J.H. Tortai : rechercher sur Z-Library

Le plus grand référentiel d'articles scientifiques au monde. 70,000,000+ d'articles gratuitement.

Don't use scam websites

Livres
Articles (48)
Les plus populaires
Liste
- Liste
- Tableau

1

Self-healing of capacitors with metallized film technology:: experimental observations and theoretical model

J.H Tortai, A Denat, N Bonifaci

Journal:

Journal of Electrostatics

Année:

2001

Langue:

english

Fichier:

PDF, 248 KB

english, 2001

2

Deprotection kinetic monitoring of a 193 nm positive tone resist by ellipsometry

H. Ridaoui, J.H. Tortai, S. Derrough, C. Sourd, H. Trouve, A. Pikon

Journal:

Microelectronic Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 247 KB

english, 2008

3

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, USA (Tuesday 11 September 2012)] Photomask Technology 2012 - Advanced module for model parameter extraction using global optimization and sensitivity analysis for electron beam proximity effect correction

Figueiro, Thiago, Abboud, Frank E., Faure, Thomas B., Choi, Kang-Hoon, Gutsch, Manuela, Freitag, Martin, Hohle, Christoph, Tortai, Jean-Hervé, Saib, Mohamed, Schiavone, Patrick

Année:

2012

Langue:

english

Fichier:

PDF, 1.10 MB

english, 2012

4

New Approach to Closely Spaced Disordered Cobalt–Graphene Polymer Nanocomposites for Non-Conductive RF Ferromagnetic Films

Takacs, H., Viala, B., Herman, V., Alarcon Ramos, J., Tortai, J.-H., Duclairoir, F.

Journal:

IEEE Transactions on Magnetics

Année:

2015

Langue:

english

Fichier:

PDF, 1000 KB

english, 2015

5

Use of optical spacers to enhance infrared Mueller ellipsometry sensitivity: application to the characterization of organic thin films

Ndong, Gerald, Lizana, Angel, Garcia-Caurel, Enric, Paret, Valerie, Melizzi, Géraldine, Cattelan, Denis, Pelissier, Bernard, Tortai, Jean-Hervé

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 978 KB

english, 2016

6

Multiwavelength interferometry and competing optical methods for the thermal probing of thin polymeric films

N. Vourdas, G. Karadimos, D. Goustouridis, E. Gogolides, A. G. Boudouvis, J.-H. Tortai, K. Beltsios, I. Raptis

Journal:

Journal of Applied Polymer Science

Année:

2006

Langue:

english

Fichier:

PDF, 754 KB

english, 2006

7

Thickness-dependent glass transition temperature of thin resist films for high resolution lithography

S. Marceau, J.-H. Tortai, J. Tillier, N. Vourdas, E. Gogolides, I. Raptis, K. Beltsios, K. van Werden

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 509 KB

english, 2006

8

UV impact on the optical properties of thin films of positive tone chemically amplified resist

J.H. Tortai, H. Trouvé, S. Soulan, A. Akbalik Rapine

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 270 KB

english, 2009

9

Modeling of ultra thin resist film structure after spin-coating and post-application bake

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 192 KB

english, 2004

10

Inverse problem solving and optical index determination of resist films by ellipsometry

J.H. Tortai, A. Akbalik Rapine, S. Soulan, P. Schiavone

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 464 KB

english, 2010

11

Influence of PEN thermal properties on flexible film patterned by nanoimprint lithography

C. Gourgon, G. Philippot, S. Labau, J.H. Tortai, M. Benwadih, J. Bablet

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 835 KB

english, 2011

12

Sensitivity analysis for accurate determination of PSF parameters

Figueiro, T., Tortai, J.H., Schiavone, P.

Journal:

Microelectronic Engineering

Année:

2012

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2012

13

PSF calibration patterns selection based on sensitivity analysis

Figueiro, Thiago, Saib, Mohamed, Tortai, Jean-Herve, Schiavone, Patrick

Journal:

Microelectronic Engineering

Année:

2013

Langue:

english

Fichier:

PDF, 1.31 MB

english, 2013

14

Modeling of ultra thin resist film structure after spin-coating and post-application bake

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 192 KB

english, 2004

15

[IEEE 2000 Annual Report Conference on Electrical Insulation and Dielectric Phenomena - Victoria, BC, Canada (15-18 Oct. 2000)] 2000 Annual Report Conference on Electrical Insulation and Dielectric Phenomena (Cat. No.00CH37132) - Predominance of joule heating effect on the electrode destruction due to a self-healing of a metallized film

Tortai, J.H., Denat, A., Bonifaci, N.

Année:

2000

Langue:

english

Fichier:

PDF, 331 KB

english, 2000

16

[IEEE 1999 IEEE 13th International Conference on Dielectric Liquids. (ICDL '99) - Nara, Japan (20-25 July 1999)] Proceedings of 1999 IEEE 13th International Conference on Dielectric Liquids (ICDL'99) (Cat. No.99CH36213) - Restoration of dielectric properties in insulating liquids after an electrical arc

Tortai, J.H., Denat, A., Bonifaci, N.

Année:

1999

Langue:

english

Fichier:

PDF, 361 KB

english, 1999

17

[IEEE Proceedings of the 2004 IEEE International Conference on Solid Dielectrics - Toulouse, France (5-9 July 2004)] Proceedings of the 2004 IEEE International Conference on Solid Dielectrics, 2004. ICSD 2004. - Self-healing of metallized polymer films of different nature

Walgenwitz, B., Tortai, J.-H., Bonifaci, N., Denat, A.

Année:

2004

Langue:

english

Fichier:

PDF, 334 KB

english, 2004

18

Diagnostic of the self-healing of metallized polypropylene film by modeling of the broadening emission lines of aluminum emitted by plasma discharge

Tortai, J.-H., Bonifaci, N., Denat, A., Trassy, C.

Journal:

Journal of Applied Physics

Année:

2005

Langue:

english

Fichier:

PDF, 313 KB

english, 2005

19

Insulating properties of some liquids after an electrical arc

Tortai, J.H., Bonifaci, N., Denat, A.

Journal:

IEEE Transactions on Dielectrics and Electrical Insulation

Année:

2002

Langue:

english

Fichier:

PDF, 568 KB

english, 2002

20

[IEEE 14th International Conference on Dielectric Liquids - Graz, Austria (7-12 July 2002)] Proceedings of 2002 IEEE 14th International Conference on Dielectric Liquids. ICDL 2002 (Cat. No.02CH37319) - Self-healing of aluminium metallized polypropylene films: a spectroscopic investigation

Tortai, J.H., Bonifaci, N., Denat, A., Lesaint, O.

Année:

2002

Langue:

english

Fichier:

PDF, 272 KB

english, 2002

21

[IEEE 2014 10th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - Grenoble, France (2014.6.30-2014.7.3)] 2014 10th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) - Structural, magnetic and dielectric properties of non conducting nanocomposites for RF applications

Takacs, H., Viala, B., Tortai, J.-H., Alarcon Ramos, J., Bousquet, M., Duclairoir, F., Gourgon, C.

Année:

2014

Langue:

english

Fichier:

PDF, 397 KB

english, 2014

22

Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

J. Thiault, J. Foucher, J. H. Tortai, O. Joubert, S. Landis, S. Pauliac

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2005

Langue:

english

Fichier:

PDF, 759 KB

english, 2005

23

Epoxy silsesquioxane resists for UV nanoimprint lithography

De Girolamo, J., Chouiki, M., Tortai, J.-H., Sourd, C., Derrough, S., Zelsmann, M., Boussey, J.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2008

Langue:

english

Fichier:

PDF, 531 KB

english, 2008

24

Core double–shell cobalt/graphene/polystyrene magnetic nanocomposites synthesized by in situ sonochemical polymerization

Hermán, V., Takacs, H., Duclairoir, F., Renault, O., Tortai, J. H., Viala, B.

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 2.77 MB

english, 2015

25

Influence of pattern density in nanoimprint lithography

C. Gourgon, C. Perret, G. Micouin, F. Lazzarino, J. H. Tortai, O. Joubert, J. E. Grolier

Année:

2003

Langue:

english

Fichier:

PDF, 1.20 MB

english, 2003

26

Influence of residual solvent in polymers patterned by nanoimprint lithography

C. Gourgon, J. H. Tortai, F. Lazzarino, C. Perret, G. Micouin, O. Joubert, S. Landis

Année:

2004

Langue:

english

Fichier:

PDF, 707 KB

english, 2004

27

Geometry impact on ultrahigh resolution pattern collapse

A. Jouve, J. Simon, L. Gonon, J. H. Tortai

Année:

2007

Langue:

english

Fichier:

PDF, 708 KB

english, 2007

28

Surface characterization of imprinted resist above glass transition temperature

T. Lévéder, S. Landis, L. Davoust, S. Soulan, J. Tortai, N. Chaix

Année:

2007

Langue:

english

Fichier:

PDF, 818 KB

english, 2007

29

CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns

G. Gay, T. Baron, C. Agraffeil, B. Salhi, T. Chevolleau, G. Cunge, H. Grampeix, J. Tortai, F. Martin, E. Jalaguier, B. De Salvo

Année:

2010

Langue:

english

Fichier:

PDF, 2.40 MB

english, 2010

30

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film

Ridaoui, H., Derrough, S., Sourd, C., Trouve, H., Pikon, A., Tortai, J. H., Henderson, Clifford L.

Année:

2008

Langue:

english

Fichier:

PDF, 222 KB

english, 2008

31

[IEEE INTERMAG 2015 - IEEE International Magnetics Conference - Beijing, China (2015.5.11-2015.5.15)] 2015 IEEE Magnetics Conference (INTERMAG) - New approach to closely-spaced disordered cobalt-graphene nanocomposites for non-conductive ferromagnetic films: From local structure to radio-electric properties

Takacs, H., Herman, V., Viala, B., Ramos, J. Alarcon, Tortai, J., Duclairoir, F.

Année:

2015

Langue:

english

Fichier:

PDF, 296 KB

english, 2015

32

Non-conductive ferromagnets based on core double-shell nanoparticles for radio-electric applications

Takacs, Hélène, Viala, Bernard, Hermán, Vanessa, Tortai, Jean-Hervé, Duclairoir, Florence, Alarcon Ramos, Juvenal, Jouneau, Pierre-Henri, Okuno, Hanako, Tallec, Gwenolé

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 1.95 MB

english, 2016

33

SPIE Proceedings [SPIE 29th European Mask and Lithography Conference - Dresden, Germany (Tuesday 25 June 2013)] 29th European Mask and Lithography Conference - Extreme long range process effects characterization and compensation

Figueiro, Thiago, Browning, Clyde, Thornton, Martin J., Vannuffel, Cyril, Choi, Kang-Hoon, Hohle, Christoph, Tortai, Jean-Herve, Schiavone, Patrick, Behringer, Uwe F. W., Maurer, Wilhelm

Année:

2013

Langue:

english

Fichier:

PDF, 454 KB

english, 2013

34

SPIE Proceedings [SPIE 21st European Mask and Lithography Conference - Dresden, Germany (Thursday 16 June 2005)] 21st European Mask and Lithography Conference - Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems

Tortai, J. H., Thiault, J., Tiron, R., Mollard, L., Haefele, Stephan, Vychub, Sergey, Lewellen, John, Brooker, Peter

Année:

2005

Langue:

english

Fichier:

PDF, 451 KB

english, 2005

35

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 22 February 2009)] Metrology, Inspection, and Process Control for Microlithography XXIII - An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods

Akbalık, Ayşe, Allgair, John A., Raymond, Christopher J., Soulan, Sébastien, Tortai, Jean-Hervé, Fuard, David, Kone, Issiaka, Hazart, Jérôme, Schiavone, Patrick

Année:

2009

Langue:

english

Fichier:

PDF, 299 KB

english, 2009

36

SPIE Proceedings [SPIE SPIE 31st International Symposium on Advanced Lithography - San Jose, CA (Sunday 19 February 2006)] Advances in Resist Technology and Processing XXIII - Overcoming pattern collapse on e-beam and EUV lithography

Jouve, A., Lin, Qinghuang, Simon, J., Pikon, A., Solak, H., Vannuffel, C., Tortai, J.-H.

Année:

2006

Langue:

english

Fichier:

PDF, 516 KB

english, 2006

37

SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists

Jouve, A., Sturtevant, John L., Simon, J., Foucher, J., David, T., Tortai, J.-H., Solak, Harun

Année:

2005

Langue:

english

Fichier:

PDF, 1.73 MB

english, 2005

38

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, United States (Tuesday 10 September 2013)] Photomask Technology 2013 - Metrology variability and its impact in process modeling

Figueiro, Thiago, Saib, Mohamed, Choi, Kang-Hoon, Hohle, Christoph, Thornton, Martin J., Vannufel, Cyril, Tortai, Jean-Hervé, Schiavone, Patrick, Faure, Thomas B., Ackmann, Paul W.

Année:

2013

Langue:

english

Fichier:

PDF, 526 KB

english, 2013

39

SPIE Proceedings [SPIE SPIE Photomask Technology - San Jose, California, United States (Monday 12 September 2016)] Photomask Technology 2016 - Improvement of Electron Beam Lithography modeling for overdose exposures by using Dill transformation

Kasprowicz, Bryan S., Buck, Peter D., Abaidi, Mohamed, Saib, Mohamed, Tortai, Jean-Hervé, Schiavone, Patrick

Année:

2016

Langue:

english

Fichier:

PDF, 717 KB

english, 2016

40

Application of cubic spline models in electron-beam lithography

Jedidi, Nader, Tortai, Jean-Hervé, Figueiro, Thiago, Schiavone, Patrick

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2015

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2015

41

Non -conductive ferromagnetic carbon-coated (Co, Ni) metal/polystyrene nanocomposites films

Takacs, H., Viala, B., Tortai, J.-H., Hermán, V., Duclairoir, F.

Journal:

Journal of Applied Physics

Année:

2016

Langue:

english

Fichier:

PDF, 1.97 MB

english, 2016

42

ChemInform Abstract: SYNTH. IN DER DIPHENYLOXID-REIHE, DARST. VON NEUEN POLYKONDENSATEN

TORTAI, JEAN-PIERRE, MARECHAL, ERNEST

Journal:

Chemischer Informationsdienst. Organische Chemie

Année:

1971

Langue:

german

Fichier:

PDF, 262 KB

german, 1971

43

Near-Zero Negative Real Permittivity in Far Ultraviolet: Extending Plasmonics and Photonics with B1-MoN x

Kassavetis, Spyros, Ozsdolay, Brian D., Kalfagiannis, Nikolaos, Habib, Adela, Tortai, Jean-Hervé, Kerdsongpanya, Sit, Sundararaman, Ravishankar, Stchakovsky, Michel, Bellas, Dimitris V., Gall, Daniel,

Journal:

The Journal of Physical Chemistry C

Année:

2019

Langue:

english

Fichier:

PDF, 3.09 MB

english, 2019

44

ChemInform Abstract: UNTERSUCHUNG DER POLYMERISATION EINIGER METHYLINDENE IN ABHAENGIGKEIT VON DER TEMPERATUR, POLYMERISATION UND COPOLYMERISATION VON METHOXYINDENEN

ANTON, ALAIN, MARECHAL, ERNEST, TORTAI, JEAN-PIERRE

Journal:

Chemischer Informationsdienst. Organische Chemie

Année:

1971

Fichier:

PDF, 104 KB

1971

45

ChemInform Abstract: UNTERSUCHUNG DER POLYMERISATION EINIGER METHYLINDENE IN ABHAENGIGKEIT VON DER TEMPERATUR, POLYMERISATION UND COPOLYMERISATION VON METHOXYINDENEN

ANTON, ALAIN, MARECHAL, ERNEST, TORTAI, JEAN-PIERRE

Journal:

Chemischer Informationsdienst. Organische Chemie

Année:

1971

Fichier:

PDF, 104 KB

1971

46

ChemInform Abstract: SYNTH. UND POLYKONDENSATION VON DERIVATEN DES DIPHENYLOXIDS UND DES DIPHENYLSULFIDS

DICHAMP, ANDRE, TORTAI, JEAN-PIERRE, MARECHAL, ERNEST

Journal:

Chemischer Informationsdienst

Année:

1972

Fichier:

PDF, 132 KB

1972

47

[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach

Alcaire, Thomas, Cunff, Delphine Le, Gredy, Victor, Tortai, Jean-Herve

Année:

2020

Fichier:

PDF, 850 KB

2020

48

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Resende, Joao, Fuard, David, Le Cunff, Delphine, Tortai, Jean-Herve, Pelissier, Bernard

Journal:

Materials Chemistry and Physics

Année:

2021

Fichier:

PDF, 4.05 MB

2021